Functional Ultrasonic Transducers Using Polyurea Piezoelectric Films
نویسندگان
چکیده
منابع مشابه
Development of piezoelectric micromachined ultrasonic transducers
Piezoelectric micromachined ultrasonic transducers (pMUTs) are an example of the application of MEMS technology to ultrasound generation and detection, which is expected to offer many advantages over conventional transducers. In this work, we investigate pMUTs through novel design and fabrication methods. A finite element (FE) model, with original tools to measure device performance, was develo...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2008
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.74.696